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特性

Sources of AMC – Contributions
> 50% of AMC (Airborne Molecular Contamination) are from process in origin
> 70% of AMC in mass content in clean room air are from processes & material outgassing
Product Overview
Mission – Systems for Contamination Control
● Facility Concepts / Rooms
● Tools & Storage units
IC2PTM – Integral Contamination Control Process
● Contamination can be described as chain of sources & measures
● Quantified performance leads to quantified results & AMC levels
● IC2P results in lowest TCO (Total Cost of Ownership)